SEMCO Group's LYDOP is the industry standard for the elaboration of Phosphorous and Boron emitters with record sheet resistance values and uniformities using POCl3 and BCl3 diffusion processes.
- Reduced pressure horizontal diffusion furnace
- Up to 5 stacked quartz tube reaction chambers
- No thermal interference between different tubes
- POCl3 and BCl3 handling with automated refill from central dispatching systems
- Lower consumption of process gases and precursors compared to competition machines
- In situ characterization and monitoring tools
- Fully automated wafer transport from cassettes or inline conveyor to tubes and back
- Unsurpassed throughput with up to 1,400 wafers per tube in back-to-back loading.